2

Clustering Equilibrium and Deactivation Kinetics in As doped Si

Year:
2000
Language:
english
File:
PDF, 60 KB
english, 2000
5

Shallow junctions for ULSI technology

Year:
1990
Language:
english
File:
PDF, 701 KB
english, 1990
8

Dopant Anomalous Diffusion Induced in Silicon by Ion Implantation

Year:
1988
Language:
english
File:
PDF, 1.03 MB
english, 1988
13

Features of arsenic clusters in silicon

Year:
2005
Language:
english
File:
PDF, 171 KB
english, 2005